Magnetic bearings, also known as active magnetic bearings, are new high-performance bearings with no mechanical contact between the rotor and the stator. It consists of mechanical components, electronic control systems, sensors and auxiliary bearings. The electromagnetic force is used to suspend the rotor in the space, and has the advantages of no mechanical wear, low energy consumption, high allowable rotation speed, low noise, long service life, and no lubrication medium. Selecting the magnetic bearing as the support of the molecular pump rotor can fundamentally solve the problem of the oil vapor backflow of the lubricating oil caused by the traditional bearing lubrication to the vacuum chamber, and make the magnetic bearing vacuum molecular pump become the preferred super device of the integrated circuit manufacturing equipment. High vacuum to obtain equipment. The magnetic bearing is another revolutionary change in the bearing industry after oil lubrication and gas lubrication, adding high-tech products to the traditional industry. In addition to its application in vacuum molecular pumps, this sophisticated mechatronic product has broad prospects in the fields of military, aerospace, petroleum, petrochemical and energy.
Hong Shenping, general manager of Zhejiang Feixuan Technology Co., Ltd., is the research and development team of the project leader, and has taken the lead in research and development of molecular pump magnetic bearings suitable for integrated circuit equipment applications. For the first time in China, they used a 5 degree-of-freedom controlled magnetic suspension bearing for the molecular pump and adopted the cross-feedback control technology to solve the gyroscopic effect of the flexible rotor at high rotational speed and improve the stability of the rotor. This motorized balancing technology effectively reduces the vibration of the rotor.
China's first magnetic bearing with independent intellectual property rights came out in Hangzhou
The expert appraisal committee headed by Wang Yuming, academician of the Chinese Academy of Engineering, announced this afternoon in Fuyang, Hangzhou: China's magnetic bearing technology research and development has made a major breakthrough, the first domestic magnetic bearing product - "FS450 molecular pump magnetic bearing based on cross-feedback control" Developed successfully in Zhejiang Feixuan Technology Co., Ltd., thus breaking the foreign technology monopoly in the field of molecular pump application, making China a country with magnetic bearing technology products with independent intellectual property rights after a few developed countries such as France, the United States, Canada, and Germany. .